Start-up unveils prototype ‘heart’ of EUV lithography amid China chipmaking push

First reported by South China Morning Post at · Updated · 3 sources

A Chinese start-up has unveiled a prototype extreme ultraviolet (EUV) light-source machine – a component often described as the “heart” of advanced lithography systems – marking an early but critical step in Beijing’s drive for self-reliance in chipmaking equipment. At the China International Industry Fair in Shanghai, Langdao Silex displayed its self-developed EUV light-source system.

Covered by 3 publishers within 18 hours of the first report.

Summary from South China Morning Post.

Reporting3

South China Morning Post Start-up unveils prototype ‘heart’ of EUV lithography amid China chipmaking push · Ann Cao,Howard Liu